日本YAMATO等離子清洗機PB600/PB1000S/PA600D

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產(chǎn)品型號PB600/PB1000S/PA600D

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詳細介紹

日本YAMATO等離子清洗機PB600/PB1000S/PA600D是中型等離子清洗機

以下是型號的詳細介紹：

Gas Plasma Ashers

PB600/PB1000S/PA600D

The PB series are of barred typeofdirect plasma method, and can be operated automatically bysimplesetting.
The model PA600is a plasmaashingsystem after the downflow method, which copes with a6-inchwafer.

Downflow method

Specifications

Model	PB600	PB1000S	PA600D
Plasmamethod	Barred type of DP mode		DF mode
Electrode	Splitof Opposite electrode structure		Roundtypeelectrode structure
RFgenerator	0 to 600W	50to1,000W	0 to 600W
Oscillating frequency	13.56MHz
Controlsystem	Digitaldisplaywith PLC control	Touch panelwithPLC	Digitaldisplaywith one touch operation
Tuningmethod	Automatic and Manual tuning
Timer	1sec.to 9H 59min.59 sec.
Chamber	Madeof quart glass
Chambersize	?200×300mmL	?300×500mmL	Adapt for 6inchwafer
Chambertemperature	Digital display
Reactiongas	O2,CF4 or others		O2,Ar,CF4,C5F8,SF6 or others
Purgegas	N2 or Dry air
Flowmeter	Flow meter1line (O2 0 to 1,000 ml/min.)	Massflow control with digital display (CF4 0 to 300sccm, O2 0 to 1,000sccm)
Vacuumgauge	Piranie type (0.4 to 3,000Pa/0.004 to 30Torr)	Digital display (0.4 to 3,000Pa/0.004 to 30Torr)
Vacuumpump	250ml/min.	700ml/min.
Emargencystop switch	Pushtype switch
Gasport	1 line (1/4"SUSSwagelok)	2line(1/4" SUS Swagelok)
Purgeport	1 line (1/4"SUSSwagelok)	1line(1/4" SUS Swagelok)
Vacuumport	1 line (SUSNW25)	1line( SUS NW25)
Externaldimensions	500mmW×600mmD×650mmH	640mmW×850mmD×1,695mmH	650mmW×800mmD×1,500mmH
Powersupply	AC200/220/380V, 3 phase and AC100/220V, single phase
Weight	Approx.130kg	Approx.180kg	Approx.150kg